Industry Background

Polysilicon is an important basic material for the semiconductor and solar photovoltaic industries. In the semiconductor field, polysilicon is the main raw material for wafers and is used to manufacture various chips, which has a vital impact on the performance and quality of semiconductor devices. At the same time, in the solar photovoltaic industry, polysilicon is the main raw material for solar cells and plays a decisive role in the efficiency and service life of photovoltaic cells.

Due to the key role of polysilicon in the semiconductor and photovoltaic industries, its quality control is particularly important. The purity, impurity content, crystal structure and other characteristics of polysilicon will directly affect the performance of the final product. Therefore, strict quality control and analytical testing of polysilicon is an important part of the polysilicon industry.

Online GC-MS System

It is a strategic cooperation between SGAO (Beijing) Intelligent Technology and Agilent. Relying on Agilent's excellent gas chromatography-mass spectrometry analysis technology, it produces the most excellent online gas chromatography-mass spectrometry. It is the determination of the "carbon" content in the process products of chlorosilane and silane gas components in polysilicon production and the qualitative and quantitative analysis of other compounds. It can achieve the most sensitive analysis application higher than the gas chromatography detector.

The online GC-MS system consists of the control and management system QC smart middle platform, explosion-proof safety system, explosion-proof full-automatic pretreatment system, and explosion-proof online automatic analysis system (online GC-MS).

The system has low detection limit, low energy consumption, simple operation and easy maintenance. It is suitable for online detection of polysilicon, electronic special gas, and high-purity gas production process pipelines. The online equipment can analyze the quality data of gas and liquid samples in real time, preset sample analysis methods, install in place, and can be used after stable operation.

Highly intelligent industrial control system

Explosion-proof online gas chromatography-mass spectrometer

Full flow path inertization anti-corrosion treatment

Automatic replacement of sample pretreatment

Reliable qualitative and quantitative analysis

The system can realize automatic operation through program cycle setting, unattended on-site, and save human resources to the greatest extent.

The unique data signal transmission module supports the simultaneous transmission of multiple sets of data to the DCS system, MES or LIMS control room and real-time linkage with the site within one analysis cycle. The instrument can be remotely operated, the method settings can be changed, and the injection cycle can be selected to complete all operations without going to the site.

System advantages

1 Real-time monitoring

The online GC-MS system can monitor the gas components in the polysilicon production line in real time, including key process media such as methyldichlorosilane, trimethylchlorosilane, and methyltrichlorosilane.

This real-time monitoring capability enables producers to understand the gas changes in the production process in a timely manner, so as to make timely adjustments and optimizations.

2 Optimize production process

In the polysilicon production line, the online GC-MS system is used to monitor the changes in impurity elements of process products in key process steps to ensure the stability and consistency of process parameters. Through real-time data analysis, production process parameters can be optimized to improve production efficiency, reduce production costs and ensure product quality.

3 Quality Control

Precisely measuring the concentration and ratio of each component is crucial to improving the purity, stability and performance of polysilicon.