The chlorosilane online impurity automatic analysis system independently developed and produced by Shigao Intelligent Technology has been successfully installed and deployed at the polysilicon production process sites of Xinte in Inner Mongolia, Lihao in Qinghai, and Yongxiang in Sichuan.

The significance of the chlorosilane online impurity automatic analysis system for polysilicon production lines lies in monitoring the production process, optimizing the production process, improving production efficiency, reducing production costs, and ensuring product quality.

The system is an indispensable and important tool in the polysilicon production process and is of great significance to promoting the sustainable development of the polysilicon production industry.

Chlorosilane Online Impurity Automatic Analysis System

1 The system provides real-time data feedback to help production personnel adjust process parameters and operating conditions in a timely manner to meet the needs of different production stages.

2 The content of each component in chlorosilane is detected through an online system, so as to adjust the process parameters and ensure the stability of the polysilicon production process and the reliability of product quality.

Security System

Physical safety

Main body: positive pressure explosion-proof

Explosion-proof power supply control system

Explosion-proof alarm control system: hydrogen chloride, hypoxia, flammable, smoke alarm

Video monitoring and early warning system: explosion-proof, 24-hour real-time monitoring

Physical exhaust emission control: positive pressure, stable

Software security

Permission management and data encryption technology

Fully automatic pretreatment system

The fully automatic pretreatment system realizes the sample pretreatment functions according to the specific working conditions of the sample:

Control pressure

Control flow

Purge replacement

Heat treatment

Vaporization treatment

PLC logic control system

The sample meets the requirements of online analysis without distortion, thus ensuring the long-term, reliable and accurate operation of the online analysis system.

Online gas chromatography analysis system

Explosion-proof gas chromatography analysis system

This system meets the needs of users to complete the quantitative analysis of constant hydrogen chloride, dichlorosilane, trichlorosilane, silicon tetrachloride, low-boiling and high-boiling substances in online chlorosilane liquid materials.

This system technical solution can use different detectors, which is suitable for high-purity gas and electronic special gas production processes, and provides data support for process quality control.

Through program cycle settings, automatic operation can be achieved, unattended on-site, and human resources can be saved to the greatest extent. It has a unique data signal transmission module, which can realize 24-hour all-weather monitoring, and supports up to one analysis cycle, and multiple sets of data are transmitted to the DCS system at the same time.