Market background

Fluorine-containing special gases, a significant branch of electronic special gases (ESGs), play a vital role in the electronics industry. These gases are typically characterized by their high purity and stability, and they are widely used in high-tech sectors such as semiconductor manufacturing, photovoltaic industries, display screen production, and laser manufacturing. They serve multiple functions during the manufacturing process, including cleaning, etching, doping, and film formation, significantly impacting the performance of the final products.

At present, fluorine-containing electronic gases account for about 30% of the total global electronic gas market. However, the accurate measurement of fluorine-containing gases has always been a challenge in the industry.

With its innovation, high intelligence technology has developed an online automated analysis system for fluorine-containing special gases, aiming to provide accurate and reliable fluorine content analysis solutions for the industry.

Common fluorinated special gases include but are not limited to the following:

Nitrogen trifluoride (NF3): A gas used for cleaning and removing deposits, usually used to clean reaction chambers and equipment surfaces.

Sulfur hexafluoride (SF6): Used as a fluorinating agent in the oxide deposition process, and as an insulating gas for filling insulating media.

Hydrogen fluoride (HF): Used to remove oxides from silicon surfaces and as an etchant for etching silicon and other materials.

Nitrogen fluoride (NF): Used to etch silicon nitride (SiN) and aluminum nitride (AlN) materials.

Trifluoromethane (CHF3) and tetrafluoromethane (CF4): used to etch fluoride materials such as silicon fluoride and aluminum fluoride.

But fluorine-containing gases have certain dangers, including toxicity, corrosiveness, combustion and so on.

01 Online automated analysis solution for fluorinated special gases

The analysis of constant impurities in fluorine-containing electronic special gases, such as O2, Ar, CO, CO2, CH4, SF6, N2O, SF6, etc., can be obtained by accurately measuring the content of various impurity gases in fluorine-containing gases.

The solution primarily consists of the QC Smart Platform, an online pre-treatment module, and an online automated analysis module (online gas chromatography system), enabling online, continuous, and high-precision analysis of fluorine-containing special gases. This system automatically detects and analyzes samples, generating analysis reports through the QC Smart Platform, which are then synchronized to the LIMS or DCS systems, providing reliable data support for the quality control of fluorine-containing special gases.