Market background

Silane, a gas source that provides silicon components, is widely used in the microelectronics, semiconductor, and solar photovoltaic industries. Due to its high purity, non-polluting nature, lack of equipment corrosion, and ability to achieve precise control, silane has become an essential special gas that cannot be replaced by other silicon source gases. Among these, silane with a purity of 6N or higher is known as electronic-grade silane gas.

Silane properties

Silane is active in chemical properties and has strong reducing properties. When it comes into contact with oxidizing substances (O2, halogen, halide, etc.), alkali or many heavy metal salt solutions, it will show strong activity.

Silane is a flammable gas at room temperature and can spontaneously ignite in air without an external ignition source. The explosive limit is 0.8% to 98%.

Silane is highly irritating, especially to the skin, eyes and respiratory tract. Exposure to high concentrations of silane may cause acute respiratory system damage and central nervous system damage.

The booming development of high-tech industries such as microelectronics, semiconductors and solar photovoltaic has led to increasing demand for electronic grade silane gas.

In order to meet the growing market demand, production enterprises need to continuously improve product quality and production efficiency. At the same time, due to the special chemical properties of electronic grade silane gas, the quality testing requirements of silane gas are becoming more and more strict. The traditional offline testing method has been difficult to meet the current needs.

In response to this demand, high intelligence technology has introduced an online automated analysis solution for electronic grade silane gas.

01 Online automated analysis solution for electronic grade silane gas

The online automation analysis system can meet the online determination of impurities such as H2, (Ar+O2), N2, CH4, CO, CO2, SiH3Cl, SiH2Cl2, SiHCl3, SiCl4, H6Si2 and hydrocarbons (C2-C4) in electronic grade silane gas.

The solution primarily consists of an explosion-proof analysis cabin, an online gas chromatography analysis system, a pretreatment system, a silane metal impurity sampling and preparation system, and an online intelligent middleware system. This setup enables the online, continuous, safe, and high-precision analysis of electronic-grade silane gas. The system automatically detects and analyzes samples, generates analytical reports through the intelligent middleware, and synchronizes these reports to the LIMS or DCS systems, providing reliable data support for the quality control of electronic-grade silane gas.

System advantages

Explosion-proof analysis cabin-safety system

• Main positive pressure explosion-proof design
• Explosion-proof power control system
• Explosion-proof alarm control system: hydrogen detector, low oxygen gas alarm, silane gas alarm, flame alarm, sound and light alarm, etc
• Explosion-proof video surveillance and early warning system: 24 hours real-time monitoring

Online gas chromatography analysis system

• Efficient linkage with the pretreatment system for online real-time analysis
• The daily processing capacity of a single unit is up to 72 samples
• Equipped with helium ion detector, detection limit is less than or equal to 1ppbv (in CH4), and repeatability error is less than or equal to 5%
• Strong accuracy and stability of sample analysis
• Automatic export of analysis reports
• Cabinet positive pressure explosion-proof design

Preprocessing system

• Customized anti-corrosion flow path design
• Enclosed treatment, strong safety
• The sample is pollution-free and accurate
• The control system realizes the automatic sample collection (including sample filtration, vacuum extraction, blowing, displacement and recovery)
• Real-time monitoring of the status of sample pretreatment process, remote processing error information, abnormal data and alarm

Silane metal impurity sampling preparation system

One-click start-up to realize the automatic preparation of samples

Low pollution and high precision sampling, sample preparation stability is strong

The sample transfer analysis room does not need pretreatment and can be analyzed directly

The sample information is synchronized to the intelligent platform and reports are automatically generated

Explosion-proof design is suitable for online installation of production process pipelines, tank areas and filling stations

Online intelligent middleware system

Intelligent control system

The automatic collection, processing and analysis of samples are realized, and the report is automatically generated

Remote spectrograph processing and data viewing are available

Real-time monitoring of sample analysis status

Data exception handling, high security

Achieve characterization and traceability of MSA/SPC