Nitrogen trifluoride (NF3) is an excellent plasma etching gas in the microelectronics industry. With its excellent etching rate and high selectivity, it plays a vital role in the plasma etching and chemical vapor deposition (CVD) cleaning process. With the development of nanotechnology and the large-scale development of electronics industry technology, its demand is increasing.

In the GB/T 21287-2021 standard, the gas purity of nitrogen trifluoride can reach up to 5N level, and the limit requirement for fluoride ions is set to no more than 0.5ppm. Therefore, in the process of producing nitrogen trifluoride, it is particularly important to accurately monitor and analyze it, which is not only related to production safety, but also directly determines whether the product quality can meet the relevant standards.

Electronic grade NF₃ online automatic analysis solution

The main impurities in NF₃ are Ar, O2, CO, CO2, CF4, N2O, SF6, etc. As long as the content of various impurity gases in NF₃ gas is accurately measured, the purity of NF₃ can be obtained.

In response to this demand, Shigao Intelligent Technology has launched an electronic grade NF₃ online automatic analysis solution.

The solution is mainly composed of the QC smart middle platform system, online pre-processing module, online automated analysis module (online gas chromatography system), etc. Through this system, the sample automatic detection and analysis data automatically generates reports through the smart middle platform and synchronizes to the LIMS or DCS system, providing reliable data support for the quality control of electronic-grade NF₃.

01 Unique expert system - intelligent middle platform system

• Digitalization

The system provides dashboard and large screen functions, which can intuitively display operation data, analysis data, instrument status, etc. in multiple forms such as charts and curves, and build a data center for instrument operation and maintenance.

• Information

With data as the core, by collecting and analyzing various sample data in the production process, the characterization and traceability of MSA/SPC are realized, providing a scientific basis for decision-making.

• Automation

The system modules are interconnected and have automatic sample detection and analysis capabilities, enabling automatic sampling and analysis at multiple sampling points and data anomaly reminders.

• Intelligent

Equipped with an industry expert system, it can not only diagnose GC analysis and equipment, but also work with the pre-processing system, post-processing system, and analysis station supporting equipment and facilities.

• High safety

If there is a sample leak, smoke alarm, toxic or harmful gas detection, abnormal temperature or humidity, etc., the system can automatically link with the DCS system and LIMS, shut down the sample injection system, and immediately notify the authorized personnel of the relevant department.

02 Online pre-processing module

• Low-pollution pipeline

Customized anti-corrosion flow path design and closed treatment prevent sample contamination, ensure the safety of sampling personnel, and effectively guarantee the accuracy of sample results.

• Automated pre-treatment

Samples are collected and pre-treated automatically (including pressure control, flow control, purge replacement, water washing and alkaline washing), effectively reducing the errors caused by human operation.

• Remote real-time monitoring

Through the QC-smart middle platform system, the status of sample pre-treatment process can be monitored in real time and intelligent control can be realized, and error information, abnormal data and alarms can be remotely processed.

03 Online Gas Chromatography System

The system integrates Agilent's excellent chromatography analysis technology to build an intelligent online analysis platform, which effectively reduces the burden of sample component detection and research work.

• Online real-time analysis

The whole process from sample injection to data analysis is automated, easy to operate, with a daily processing throughput of 48 samples. It has a built-in quantitative analysis function and can accurately analyze the content of various components in the sample.

• Equipped with a helium ion detector

The system has high measurement accuracy, trace gas analysis at the ppb level, low detection limit, high reliability, wide application range and strong scalability.

• Efficient linkage

It can be linked with the online pre-treatment module to ensure the accuracy and stability of samples from injection to detection and analysis, and realize personalized automatic collection, processing and analysis of samples.

• Remote real-time monitoring

Through the intelligent control of QC-Smart Middle Station, you can remotely process spectra and view data, monitor the sample analysis status in real time, remotely edit sample methods and sequences, and automatically export analysis reports to synchronize to the DCS system or LIMS system.