With the rapid development of the semiconductor industry, online analysis systems have also been quickly integrated into the semiconductor process flow. The online analysis system optimizes the material selection, feeding and production process of the semiconductor industry, simplifies the process operation process, and provides a large amount of data support and mature applications, aiming to solve the detection and control of silane gas, total carbon and other impurities in the polysilicon production process for customers.

The online analysis system is based on the mature analysis methods and equipment of the polysilicon laboratory, combined with automation and AI algorithms, to help factories produce quickly, improve product quality, and improve production processes. It has far-reaching significance for the future high-purity silicon technology reserves...

The application of online analysis technology in the field of polysilicon can help enterprises achieve goals in process control and optimization, equipment monitoring and maintenance, product quality testing, environmental monitoring and protection, and energy management and optimization, improve the production efficiency of enterprises, reduce costs, improve product quality, protect the environment, and enhance the competitiveness of enterprises.

Solutions  Features

01 Preset sample analysis method, after installation and stable operation, it can be used without a lot of debugging work.

02 Automatic operation can be achieved through program cycle setting, unattended on-site operation, and human resources can be saved to the greatest extent

03 Unique data signal transmission module: RS485 digital signal under Modbus protocol can be selected, or analog 4~20mA signal transmission can be transmitted.

04 12 sets of data are concurrent in one analysis cycle, and the control room of the DCS system is linked with the site in real time. The instrument can be remotely operated, method settings, injection cycles, etc. can be changed, and all operations can be completed without going to the site.

05 Alarm values can be set for each component data, including temperature, combustible gas and other parameters. When the alarm value is exceeded, the safety mode is automatically started to ensure site safety.